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                                    AEROBAR%u00ae MP 5635 (M)Ultra-Clean Metal-free Modulated Pulse BarThe Model 5635 and 5635M Modulated Pulse (MP) ionizing AeroBar's are specifically designed to eliminate static charge in semiconductor and other ultra-clean manufacturing processes where fast discharge time, low swing voltages and precision balance are required. This breakthrough technology enables Model 5635 mounting within 150 mm of the wafer. MP Technology, combined with ultra-clean silicon emitter points and precision adjustment, the 5635 MP bar exceeds ISO 14644-1 Class 1 cleanliness to meet the Extended ISO Class 1 level for particles down to 10 nm critical for smaller technology nodes. MP Technology is easy to adjust and features the ability to fine-tune voltage, frequency and balance to meet differing environmental and product sensitivity requirements. %u2022 Extended ISO Class 1 (>10 nm) particles cleanliness %u2022 Modulated Pulse Technology%u2022 Excellent lateral uniformity%u2022 Low field voltages%u2022 Air-assist capability%u2022 Optional software with an easy-to-use interface with wide adjustability%u2022 Alarm output signal%u2022 Compatible with all wafer technology nodes including 14 nm and below%u2022 Precision balance, high ion output with long-term stability%u2022 Uniform balance across the AeroBar%u2022 Safe placement as close as 150 mm of the wafer or reticle%u2022 Enhanced static charge neutralization at fast automation speeds%u2022 Fast setup and easy optimization in any environmentFeaturesBenefitsModel 5635Model 5635M (metal-free)Cleanliness%u2014Extended ISO Class 1Model 5635 and 5635M are designed to operate in and maintain ISO 14644-1 cleanliness (10 particles or less per m3 for particles of 0.1 micron and larger). Model 5635 will also perform to Extended ISO Class 1 cleanliness (1200 particles or less per m3 (34 particles per ft3) for particles of 10 nm and larger) when operated at 45-50% output voltage setting and OpenJet nozzles with Single-crystal Silicon emitters.19 Sales Service +1 (510) 217-0460 or +1 (800) 367-2452 www.simco-ion.com/technology Ionizing Bars
                                
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