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                                    AEROBAR%u00ae 5225Ultra-Clean In-tool Ionizing Bar with Software ControlSimco-Ion%u2019s Digital AeroBar with Software Control Model 5225 is designed to handle the demanding requirements of in-tool ionization. With high ion output providing fast neutralization of electric charge on wafers, SEMI E78 compliance can be achieved at the most stringent levels.An aerodynamic design and cleanroom-compatible materials allow the Model 5225 to deliver complete and efficient ionization in minienvironments without disrupting laminar airflow. The AeroBar is easily integrated with your tool, using either precompiled routines or open-source code examples. Seamless integration with tool interfaces means a less costly solution to ionization, in addition to the benefits of reduced maintenance cost and better alarm handling. System alerts and messages are displayed at the tool controller for easy notification. Alternatively, simple FMS alarm output is available.%u2022 Complete integration with the tool control system%u2022 Fully adjustable parameters for each AeroBar %u2022 Ion current monitoring%u2022 Several lengths available including 3 specifically designed for EFEMs%u2022 Single-crystal silicon emitter points or titanium emitter points are also available%u2022 Setup, operation, & maintenance are controlled using an existing tool or IonMonitor software GUI%u2022 Fine-tune ionization for individual process requirements in each area of the tool%u2022 More consistent ion output & stable performance%u2022 Flexible lengths mean versatility for a variety of application designs%u2022 Industry demonstrated cleanest emitter material, with no risk of wafer contamination from dopants or metalsFeaturesBenefitsBar Lengths22%u201d (569 mm)28%u201d (721 mm)44%u201d (1128 mm)64%u201d (1636 mm)84%u201d (2144 mm)Designed for front-end and back-end semiconductor manufacturing to control electrostatic discharge and particle contamination in mini-environment and workstationsA15 Sales Service +1 (510) 217-0460 or +1 (800) 367-2452 www.simco-ion.com/technology Ionizing Bars
                                
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