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                                    ISO 14644-1 CLEANROOM STANDARDS (2015)Standards Title AbstractISO 14644-1:2015 Part 1: Classification of air cleanliness by particle concentration Specifies the classification of air cleanliness in terms of concentration of airborne particles in cleanrooms and clean zones.ISO 14644-2:2015 Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentrationSpecifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration.ISO 14644-3:2019 Part 3: Test methods Provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions.ISO 14644-4:2022 Part 4: Design, construction and start-up Specifies the process for creating a cleanroom from requirements through to its design, construction, and start-up. It applies to new, refurbished, and modified cleanroom installations.ISO 14644-5:2004 Part 5: Operations Specifies basic requirements for cleanroom operations. It is intended for those planning to use and operate a cleanroom.ISO 14644-7:2004 Part 7: Separative devices (clean air hoods, gloveboxes, isolators, and mini-environments) Specifies the minimum requirements for the design, construction, installation, test, and approval of separative devices.ISO 14644-8:2022 Part 8: Assessment of air cleanliness by chemical concentration (ACC) Establishes typical assessment processes to determine grading levels of air chemical cleanliness (ACC) in cleanrooms and associated controlled environmentsISO 14644-9:2022 Part 9: Assessment of surface cleanliness for particle concentration Establishes a procedure for the assessment of particle cleanliness levels on solid surfaces in cleanrooms and associated controlled environment applications.ISO 14644-10:2022 Part 10: Assessment of surface cleanliness for chemical contamination Establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms, and particles).ISO 14644-12:2018 Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration Covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.ISO 14644-13:2017 Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classificationsGives guidelines for cleaning to a specified degree on cleanroom surfaces, equipment surfaces in a cleanroom, and surfaces of materials in a cleanroom.ISO 14644-14:2016 Part 14: Assessment of suitability for use of equipment by airborne particle concentrationSpecifies a methodology to assess the suitability of equipment (e.g., machinery, measuring equipment, process equipment, components, and tools) for use in cleanrooms and associated controlled environments.ISO 14644-15:2017 Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentrationProvides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environmentsISO 14644-16:2019 Part 16: Energy efficiency in cleanrooms and separative devices Gives guidance and recommendations for optimizing energy usage and maintaining energy efficiency in new and existing cleanrooms, clean zones and separative devices.ISO 14644-17:2021 Part 17: Particle deposition rate applications Gives direction on the interpretation and application of the results of the measurement of particle deposition rate on one or more vulnerable surfaces in a cleanroom as part of a contamination control program.ISO 14644-18:2023 Part 18: Assessment of suitability of consumablesGives guidance for assessing personal and non-personal consumables for their appropriate use in cleanrooms, clean zones, or controlled zones, based on product and process requirements, cleanliness attributes, and functional performance properties.ISO/TR 14644-21:2023 Part 21: Airborne particle sampling techniques Discusses the physical limitations of probe and particle counter placement, and any tubing that connects the two, particularly in providing representative samples where particles 5 micrometres and greater are of interest.Source: https://www.iso.org/Cleanliness LevelISO 14644-1 Class NumberMaximum Concentration Limits (particles/m3 of air) for Particles Equal To and Larger than the Considered Sizes ShownFED STD 209E Equivalent*Particles/Ft3of Air>0.1 mm >0.2 mm >0.3 mm >0.5 mm >1 mm >5 mm >0.5 mmExtremely Clean ISO 1 10 2ISO 2 100 24 10 4ISO 3 1,000 237 102 35 8 Class 1 1ISO 4 10,000 2,370 1,020 352 83 Class 10 10ISO 5 100,000 23,700 10,200 3,520 832 29 Class 100 100ISO 6 1,000,000 237,000 102,000 35,200 8,300 293 Class 1,000 1,000ISO 7 352,000 83,200 2,930 Class 10,000 10,000ISO 8 3,520,000 832,000 29,300 Class 100,000 100,000Clean ISO 9 35,200,000 8,320,000 293,000 Room Air* Canceled on 9/11/92%u2013superseded by ISO Standards. 7 Sales Service +1 (510) 217-0460 or +1 (800) 367-2452 www.simco-ion.com/technology ISO Standards
                                
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