Page 56 - Demo
P. 56
ULTRA-CLEAN IONIZATIONMicro SeriesProducts Model 4210 (u)(n) Model 4214 (un) Model 4630 Quadbar Model 4635 Quadbar In-line fusION Feature4210: CDA or N2 high output Tungsten emitters for general use in-line applications4210u: CDA with Single-crystal Silicon emitters for ISO 14644-1 Class 34210un: N2 with Single-crystal Silicon emitters for ultra-clean applicationsSelf-balanced, no calibration required; unlike other N2 ionizers which depend onthe trace gases in the nitrogen stream toproduce ionization, it is designed to ionizeN2 (99.999%) gas flow in ultra-clean semiconductor & other high purity processesUnique quadrupole ensure effective ionization as close as 3\Quadrupole configuration with unique cross-channel air cartridge around emitter points for independent air deliveryin tight spaceStandard Cartridge: Fits around emitter points to provide CDA or N2Jet Cartridge: High-velocity jet for air centered between all 4 emitter points to greatly reduced discharge timesFast decay times through output tubes; tubes may be split into multiple tubes toservice multiple locationsOptimal Performance: Use nitrogen kit forpure N2 or 1-2% CDA mixture applicationDischarge4210, 10 sec; 4210u, 5 sec; 4210un, 10 secMeasured thru 6%u201d long, 1/4%u201d ID Teflon tube held 6%u201d from CPM, airflow rate 2 scfmw/o Manifold: <10 sec @ 6%u201dw/Manifold: <100 sec @ 19.6%u201d (49.8 cm)<30 sec @ 12%u201dDirectly under emitter points(80-100 fpm airflow)Standard Cartridge: <15 sec @ 12%u201dJet Cartridge: <6 sec @ 12%u201dDirectly under emitter points (0.53 cfm purging gas airflow)<5 sec @ 6%u201d(10 psi gas pressure)Balance <%u00b125V @ 6%u201d(specified flow & pressure) %u00b125V @ 6%u201d Intrinsically balanced %u00b150V @ 6%u201d & 12%u201dDirectly under emitter points with airflowIntrinsically balanced %u00b150V @ 6\Directly under emitter points with airflow <%u00b150V Ion Emission IsoStat High Frequency AC Steady-state DC Steady-state DC Steady-state DC Cleanroom Class4210: ISO 14644-1 Class 54210u/4210un: ISO 14644-1 Class 3ISO 14644-1 Class 1 (0.1 %u03bcm particles) Extended ISO Class 1 (0.01 %u03bcm particles)ISO 14644-1 Class 1 (24 VDC) ISO 14644-1 Class 2 (24 VAC & Ctrl)ISO 14644-1 Class 1 (24 VDC) ISO 14644-1 Class 2 (24 VAC & Ctrl) ISO 14644-1 Class 4 Airflow CDA or N2(min 1.5 cfm @ 10-50 psi)N23.53 cfm @ 30 psi (max 100 lpm @ 207 kPa)Laminar Flow (80-100 fpm)CDA or N2(0-25 lpm @ 0-7 psi)CDA or N2(0.8 scfm @ 5 psi to 3.6 scfm @ 50 psi)Operating EnvironmentAmbient -4%u00b0F to -140%u00b0F (-20%u00b0C to 60%u00b0C) max 59-140%u00b0F (15-60%u00b0C) max 59-122%u00b0F (15-50%u00b0C) recommended20-65%, RH, non-condensing 59-122%u00b0F (15-50%u00b0C) recommended20-65% RH, non-condensing32-122%u00b0F (0-50%u00b0C)20-65%, non-condensingDimension/Weight2.38%u201dD x 4.75%u201dL x 3.13%u201dW (6.06 x 12.0 x 7.95 cm)2.31 lb (1.04 kg)6.01%u201dL x 2.85%u201dW x 1.26%u201dH (15.2 x 7.26 x 3.20 cm)1.4 lb (0.64 kg) 1.38%u201dH x 1.28%u201dW x 4.50%u201dL(3.56 x 3.30 x 11.4 cm) with flange0.22 lb (0.10 kg)1.42%u201dH x 1.32%u201dW x 4.50%u201dL(3.61 x 3.35 x 11.4 cm) w/flange0.24 lb (0.11 kg)2.52%u201dH x 1.28%u201dW x 4.50%u201dL (6.40 x 3.25 x 11.4 cm) incl air connectors0.30 lb (0.136 kg)49