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ISO 14644-1 Class 1 (2015) establishes 9 particulate class limits. A class is met when airborne particles-per-cubic-meter (or particles-per-cubic-foot) do not exceed the class limit. The following graph summarizes the class limit lines for particles between 0.1 micron and 5 micron.1091081071061051041031021011000,1 0,2 0,3 0,4 1,0 5,0Cn = 10N x (0.1 /D)2.08ISO Class 9ISO Class 8ISO Class 7ISO Class 6ISO Class 5ISO Class 4ISO Class 3ISO Class 2ISO Class 1Airborne Particle Concentration (Cn, particles/m3)Particle Size (D in %u00b5m)______________________Chart from ISO 14644-1 (1999 version): Annex A - InformativeSingle-Crystal Silicon (SCSi): AeroBar MP Ionizing Bars with OpenJet Silicon Emitter Nozzles, such as the 5635, 5635 Metal-free, and 5645 Low Profile, are designed to operate in and maintain ISO 14644-1 Class 1 cleanliness (10 particles or less per m3 for 0.1 micron and larger). Currently, no standard exists for measuring particles below 0.1 microns. Model 5645 LP, when operated at 45-50% output voltage and with OpenJet nozzles with single-crystal silicon emitters, has been tested using CPC techniques and generates fewer than 1200 particles (0.01 micron and larger) per cubic meter. Indeed, the state-of-the-art AeroBar MP Model 5645 LP surpasses ISO Class 1 cleanliness, meeting Extended ISO Class 1* for %u226510 nm particles%u201d, thereby providing the cleanest bar ionization for the ultra-clean semiconductor manufacturing process.Titanium (Ti): Model 5630 with TurboJet Titanium Emitter Nozzles, and Model 5645 with OpenJet Titanium Emitter Nozzles, are designed to operate in and maintain ISO 14644-1 Class 3 cleanliness (1000 particles or less per m3 for particles of 0.1 micron and larger)._______________* Extended ISO Class 1: An extrapolation of ISO 14644-1 down to 0.01 micro (10 nm) particles, measured with a condensation nucleus counter (CNC). ISO CLASS 1 FOR 0.1 & 0.01 MICRON PARTICLESsalesservices@simco-ion.com 8ISO Standards