Page 60 - Demo
P. 60
Simco-Ion%u2019s In-line Ultra-clean Nitrogen Ionizer Model 4214 is specifically designed to ionize a nitrogen gas flow in ultra-clean semiconductor or other high purity processes. Unlike other nitrogen ionizers which depend on the trace gases in the nitrogen stream to produce ionization, this state-of-the-art product ionizes nitrogen molecules using a small but efficient power supply.The Model 4214 utilizes High-Frequency AC Ionization Technology to provide a fast discharge time for optimal static charge neutralization. The microprocessor controls and small form-factor, make it an ideal nitrogen ionizer for in-tool integration. The ultra-clean design, utilizing an internal particle containment system assures the cleanest ionization for critical semiconductor processes. By providing a continuous flow of nitrogen through the ionizer, this breakthrough technology meets ISO 14644-1 Class 1 cleanliness requirements, making it ideal for 22 nm and below technology nodes%u2022 Extended ISO 14644-1 Class 1 cleanliness%u2022 Alarms indicating low ion output, high voltage power supply failure, low gas flow%u2022 Standby mode %u2022 Self-balanced ionization %u2022 Auto shutoff with low gas flow%u2022 Compact size%u2022 +24 VDC input power%u2022 Provides clean ionization for any ultra-clean process; ideal for 22 nm and below technology nodes%u2022 Constant ionizer status monitoring for continued continuous optimal performance%u2022 Nitrogen saving Standby mode that reduces gas flow while maintaining fast ionization startup%u2022 Eliminates calibration or difficult setup %u2022 Prevents product damage%u2022 For in-tool applications with tight space constraints %u2022 Connects to tool power for simple integrationFeaturesBenefitsModel 4214Ultra-clean Nitrogen In-line Gas IonizerThe small size of the in-line ultra-clean gas ionizer Model 4214 provides superior static neutralizing ionization for semiconductor device manufacturing vertical furnaces.Chart from ISO 14644-1 (1999 version): Annex A - Informative.53 Sales Service +1 (510) 217-0460 or +1 (800) 367-2452 www.simco-ion.com/technology Special Application Ionizers