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AeroBar® 5225 Ionizing System

AeroBar 5225 ISO Class 1 Software-controlled Static Control Ionizing Bar

        

    

Cleanroom Compatible for High Ion Output for Fast Neutralization

    The Digital AeroBar with Software Control Model 5225 is designed to handle the demanding requirements of in-tool ionization. With high ion output that rapidly neutralizes the electric charge on wafers, E78 compliance can be achieved at the most stringent levels.

    Aerodynamic design and cleanroom-compatible materials enable the Model 5225 to deliver complete, efficient ionization in mini-environments without disrupting laminar airflow. 

  • Complete integration with tool control system
  • Fully adjustable parameters for each AeroBar
  • Ion current monitoring
  • Several lengths available including 3 specifically designed for EFEMs
  • Single-crystal silicon emitter points

Interface Module Model 5200-IM6T

Powers and supports up to 6 AeroBar Model 5225 Ionizers, FMS output.

 

 

For additional information on the AeroBar 5225 ionizer or other ionization solutions for static control and particle contamination control, contact Sales Services.

Sales Services: 

+1 (510) 217-0460

Toll Free:

+1 (800) 367-2452

salesservices@simco-ion.com
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Specifications

AeroBar 5225  
Voltage Input: 24 VAC, 50/60 Hz, 1W (typ); powered by Interface Module Model 5200-IM6T
Output: 0-20 kVDC, ±10% for each polarity on an individual AeroBar; positive or negative output levels can be adjusted separately through GUI
Ion Emission Pulsed DC, Steady-state DC, or Standby
Emitter Single-crystal Silicon, replaceable
Cleanroom Class ISO 14644-1 Class 1
Dimension 2.1”H x 1.2”W x 22.4 / 28.4 / 35.7 / 44.4 / 55.6 / 64.4 / 75.5 / 84.4”L
(5.3 x 3.1 x 56.9 / 72.1 / 90.7 / 112.8 / 141.2, 163.6 / 191.8 / 214.4 cm)
Weight 1.13 lb (0.51 kg) for a 22” (55.9 cm) bar (approx. 6 oz per additional ft/0.17 kg per additional 30.5 cm)
Interface Module
Model 5200-IM6T 		  
Input Voltage 24 VDC, 1.0A, ±5%
Capacity Connect to up to six Model 5225 AeroBars
LED Indicator Green POWER ON, yellow COMMUNICATION, red ALARM
Dimension 2.76”H x 2.88”W x 12.4”L (7.01 x 7.32 x 31.5 cm) with flange
Weight 2.6 lb (1.18 kg)
  • Wire Terminal Connector
  • Wire Ties
  • Tie Blocks
  • Interconnect Cables
  • CPC Cables
  • Standard AeroBar Installation Kit
  • Pine Tree Clips
  • Eyebolt with nut
  • Mid-Clips
  • Wire Clip
  • Flat Clip
  • Stainless steel T-Bar Clip
  • Ultra-clean Sleeved (Silicon) Emitter Point
  • Simco-Ion Emitter Point Cleaner
  • Polycarbonate Rods

Please refer to all the applicable industry standards for comprehensive electrostatic charge management on our Industry Standards page.

Target Markets

  • Back-End Semiconductor Processing
  • Front-End Semiconductor Manufacturing

Target Applications

The AeroBar 5225 is designed to control electrostatic discharge and particle contamination in mini-environments and workstations and in locations where forced-air is not favored and usually work in cleaner environment with laminar flow.

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