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AeroBar® 5645

5645 In-tool 5V Ionizing Bar

 +/-5V Closed-loop Feedback with Novx     

   

   

Modulated Pulse AeroBar® with Feedback Control

Modulated Pulse (MP) Technology ionization bars are available with Titanium Emitter Nozzles and Low Profile Single‑Crystal Silicon Emitter Nozzles. The Low Profile nozzle enhances performance and reduces overall bar height to 2.6” (65.3 mm) for space‑constrained installations. The Model 5645 MP bar delivers industry‑leading balanced ionization performance for semiconductor back‑end advanced packaging and test environments, as well as front‑end ultra‑clean applications requiring fast discharge times, low swing voltages, and precision balance.


When integrated with a Novx System or Novx Inside monitoring and feedback control, the 5645 maintains balance better than ±5V. The bar allows easy adjustment of voltage, frequency, and balance to meet environmental and product‑sensitivity requirements. Model 5645 MP bars are available in 14 lengths ranging from 350 mm to 2350 mm.±5V with Novx System or Novx Inside version

  • ±5V with Novx System or Novx Inside version

  • Centralize power and control with widely adjustable MP Control software 

  • Antenna input, FMS connection, alarms, power, and communications are located on the same end of the bar

  • ISO 14644-1 Class 1 and Extended ISO Class 1 with SCSi emitter

 


For additional information on the AeroBar 5645 or other ionization solutions for static control and particle contamination control, contact Sales Services.

Specifications

Voltage Input: 24 VDC ±10%, 0.7A (max)
Output: 13.5 kV peak-to-peak (max)
Discharge 15 sec (typ) with no air-assist measured @ 24” below AeroBar center
Balance <±5V, Novx System or Novx Inside; <±20V, Standalone
Ion Emission Modulated pulse (MP) Technology
Emitter Titanium
Cleanroom Class ISO 14644-1 Class 3
Dimension 3.1”H x 1.3”W x 13.8 / 17.7 / 23.6 / 33.5 / 39.3 / 45.3 / 51.2 / 57.1 / 63.0 / 69.0 / 74.8 / 80.7 / 86.6 /  92.5”L (7.8 x 3.4 x 35 / 45 / 60 / 85 / 100 / 115 / 130 / 145 / 160 / 175 / 190 / 205 / 220 / 235 cm)
  • Model 5601 Power Distribution Box 
  • 24 VDC Power Converter with Power/Signal Junction Box Kit 
  • Signal and Power Junction Box 
  • CAT-5 with RJ-45 Ethernet Cable
  • 24 VDC Power Supply for Model 5601 Power Distribution Box 
  • Titanium emitter point (OpenJet emitter nozzle)

Please refer to all the applicable industry standards for comprehensive electrostatic charge management on our Industry Standards page.

Target Markets

Ultra-clean & Advance ESD-protection for Back-end & Front-end Semiconductor
& G
eneral Electronic Assemblies

Target Applications

Semiconductor back-end manufacturing processes

Wafer probe
Back grinding
Wafer mount
Wafer level

 

Die bonding
Wire bonding
Trim & Form

 

Dicing
Testing
Bumping

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