Go

Back-end Semiconductor Processing Static Control Solutions

Critical Protection from ESA, ESD, and Particle-Driven Yield Loss

In back-end semiconductor manufacturing—encompassing assembly, advanced packaging, hybrid bonding, panel handling, and final test—ESA (electrostatic attraction) and ESD (electrostatic discharge) increasingly impact yield and long-term reliability. As hybrid bonding pitches shrink below 10 µm and panel-level packaging scales to larger substrates, even minor charge imbalances can drive particle adhesion, bond voids, misalignment, and latent device damage that may not be detected during early testing. 

Advanced packaging is now a primary engine of AI-era semiconductor performance, and clean, charge-stable back-end environments are becoming front-end-like in their control requirements—especially for hybrid bonding and PLP workflows. 

Industry Challenges

Why Static Control Matters in Back-end Semiconductor Processing Environments
                     
                     
BOND VOIDS
AND OPENS

Static-attracted particles create bond voids and electrical opens in hybrid bonding

 
LATENT ESD
DAMAGE

Low-voltage devices are vulnerable to ESD events that escape test but fail in the field

 
PANEL-AREA
CHARGE BUILDUP

Large PLP substrates accumulate charge that drives particle attraction during handling

 
ALIGNMENT
DRIFT

Charge imbalance near bond tools can disrupt sub-micron alignment accuracy

 
THROUGHPUT LOSS

Electrostatic contamination increases rework, inspection failures, and downtime.

 
AUDIT AND
TRACEABILITY

Advanced packaging lines require continuous monitoring to meet ESD audit demands

Industry Regulation

What Regulations Address Static Control in the Industry?

Static control is no longer optional in advanced packaging environments where yield is highly sensitive to ESA-driven contamination and ESD-induced latent damage—especially as hybrid bonding and PLP move toward tighter cleanliness and traceability expectations.

  • ANSI/ESD S20.20 – Framework for ESD control programs: grounding, ionization, personnel handling, and auditing. 
  • IEC 61340 Series – International methods and requirements for electrostatic control materials and measurements. 
  • ISO 14644-1 – Cleanroom classification by particle concentration; increasingly relevant as back-end moves toward ISO Class 2–3 for hybrid bonding readiness.
  • SEMI E78 – Ionizer performance evaluation (decay time, balance, stability), used broadly in semiconductor ionization qualification.

Key Application Areas

Back-end Semiconductor Processing Applications We Support

Static and contamination control are critical across advanced packaging and final manufacturing steps, including:

  • Hybrid Bonding tools & alignment modules (wafer-to-wafer, die-to-wafer, die-to-die) 
  • Panel-Level Packaging (PLP) handling, transfer, conveyors, staging 
  • HBM stacking & chiplet assembly (high-density die stacking and placement) 
  • Pick-and-place, die attach, lid/cover handling, carrier/tray transport
  • Final test & inspection (pre-inspection neutralization, optics protection, recontamination prevention)

For additional information on back-end semiconductor processing solutions, contact Sales Services.

Benefits of Static Control

  • Yield Protection – Reduce bond voids, opens, and latent failures caused by ESA/ESD in advanced packaging.
  • Lower Defectivity in Critical Steps – Support ultra-clean transfer from clean → activate → align → bond.
  • Process Stability at Scale – Maintain charge stability across large panels and high-throughput handling.
  • Regulatory & Customer Readiness – Build audit-ready logs aligned with modern ESD programs and global standards.
  • Real-Time Insight – Enable continuous monitoring and feedback control to prevent drift before yield loss occurs.

Our Solutions

Targeted Solutions for Back-End Semiconductor Environments

Product Groups

Models (click on product models below)

Room Ionization System

Model 5515 Room System

Ionizing Blowers

Model 5842

Ionizing Bars

AeroBar MP 5645
Special Application

Model 4210, Model 4214

Ionizing Air Guns & Nozzles

AirForce 6115

Static Control Monitoring Systems

Novx 3352, Novx 3362, Novx 7000

Instrumentation Fieldmeter 775 or Fieldmeter FMX-004, 775PVS, CPM280A

 

 

Contact us