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AeroBar® 5645EM MP | METAL-FREE

Metal-free Ultra-clean Air Ionizing AeroBar Model 5635M

         

 

     

Modulated Pulse AeroBar®

Simco-Ion, Technology Group’s latest Modulated Pulse (MP) Technology Ionization Bar is now available with Low Profile Single-Crystal Silicon Emitter Nozzles. This improves performance and reduces overall height to 2.6” (65.3 mm) for space-constrained applications. The 5645EM (Metal-Free) MP Bar is designed to provide balanced ionization performance for semiconductor back-end advanced packaging and test applications, and front-end ultra-clean applications where exposed metallic surfaces are not permitted, with fast discharge times, low swing voltages, and precise balance. 

The 5645EM (Metal-Free) MP Bar meets the Extended ISO Class 1* level for particles down to 10 nm, exceeding ISO 14644-1 Class 1 cleanliness. It is available in 14 lengths, from 350 to 2350 mm. Shorter bars (<600 mm) feature 50 mm nozzle spacing to improve ion distribution in close-up applications.

  • <±20V balance
  • Extended ISO Class 1* (10 nm particles) cleanliness with Metal-free design “EM”  
  • Centralize power and control with widely adjustable MP Control software 
  • FMS connection, alarms, power, and communications are located on the same end of the bar

 

For additional information on the AeroBar 5645EM ionizer or other ionization solutions for static control and particle contamination control, contact Sales Services.

Sales Services: 

+1 (510) 217-0460

Toll-Free:

+1 (800) 367-2452

salesservices@simco-ion.com
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Specifications

Input Voltage 24 VDC ±10%, 0.7A (max) by one of the following:
– 24 VDC tool’s power line
– Simco-Ion P/N 33-25625 24 VDC Power Converter
– Simco-Ion 5601 Power Distribution Box for max 8 bars system
Discharge 15 sec (typ) with no air-assist measured @ 24” (61.0 cm) below AeroBar center
Balance <±20V
Ion Emission Modulated Pulse (MP) Technology
Emitter Point: Single-crystal Silicon 
Cleanroom Class ISO 14644-1 Class 1 & Extended ISO Class 1
Dimension

2.6”H x 1.3”W x 13.8/17.7/23.6/33.5/39.3/45.3/51.2/57.1/63.0/69.0/74.8/80.7/
86.6/92.5”L
(6.5 x 3.4 x 35/45/60/85/100/115/130/145/160/175/190/205/
220/235 cm) 
  • Signal and Power Junction Box for FMS Connection
  • Remote Serial Adapter Kit
  • 100-240 VAC to 24 VDC Power Transformer
  • 24 VDC Power Converter with Signal and Power Junction Box
  • Delrin Plastic flat mounting bracket and swivelCat-5e with RJ-45 Ethernet Cable
  • OpenJet Nozzle Assembly
  • IEC Power Cord
  • Single Crystal Silicon Emitter Points
  • Simco-Ion Emitter Point Cleaner

Please refer to all the applicable industry standards for comprehensive electrostatic charge management on our Industry Standards page.

Target Markets

Front-End Semiconductor Manufacturing

Target Applications

AeroBar 5645EM is specifically designed for semiconductor wafer processing and for stringent cleanliness and performance requirements at smaller geometries, as well as in environments that require metal-free conditions. It provides ISO 14644-1 Class 1 & Extended ISO Class 1.

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