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AeroBar® 5225 Ionizing System

AeroBar 5225 ISO Class 1 Software-controlled Static Control Ionizing Bar

        

    

Cleanroom Compatible for High Ion Output for Fast Neutralization

Simco-Ion, Technology Group's Model 5225 Digital AeroBar with Software Control is designed to handle the demanding requirements of in-tool ionization. With high ion output providing fast neutralization of electric charge on wafers, E78 compliance at the most stringent levels can be achieved.

  • Complete integration with tool control system
  • Fully adjustable parameters for each AeroBar
  • Ion current monitoring
  • Several lengths available including 3 specifically designed for EFEMs
  • Single-crystal silicon emitter points

Interface Module Model 5200-IM6T

Powers and supports up to 6 AeroBar Model 5225 Ionizers, FMS output.

 

 

For additional information on the AeroBar 5225 ionizer or other ionization solutions for static control and particle contamination control, contact Sales Services.

Sales Services: 

+1 (510) 217-0460

Toll Free:

+1 (800) 367-2452

salesservices@simco-ion.com
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Specifications

AeroBar 5225  
Voltage Input: 24 VAC, 50/60 Hz, 1W (typ); powered by Interface Module Model 5200-IM6T
Output: 0-20 kVDC, ±10% for each polarity on an individual AeroBar; positive or negative output levels can be adjusted separately through GUI
Ion Emission Pulsed DC, Steady-state DC, or Standby
Emitter Single-crystal Silicon, replaceable
Cleanroom Class ISO 14644-1 Class 1 (Single-crystal Silicon emitter)
ISO 14644-1 Class 3 (Titanium emitter)
Dimension 2.1”H x 1.2”W x 22.4 / 28.4 / 35.7 / 44.4 / 55.6 / 64.4 / 75.5 / 84.4”L
(5.3 x 3.1 x 56.9 / 72.1 / 90.7 / 112.8 / 141.2, 163.6 / 191.8 / 214.4 cm)
Weight 1.13 lb (0.51 kg) for a 22” (55.9 cm) bar (approx. 6 oz per additional ft/0.17 kg per additional 30.5 cm)
Interface Module
Model 5200-IM6T 		  
Input Voltage 24 VDC, 1.0A, ±5%
Capacity Connect to up to six Model 5225 AeroBars
LED Indicator Green POWER ON, yellow COMMUNICATION, red ALARM
Dimension 2.76”H x 2.88”W x 12.4”L (7.01 x 7.32 x 31.5 cm) with flange
Weight 2.6 lb (1.18 kg)
  • Wire Terminal Connector
  • Wire Ties
  • Tie Blocks
  • Interconnect Cables
  • CPC Cables
  • Standard AeroBar Installation Kit
  • Pine Tree Clips
  • Eyebolt with nut
  • Mid-Clips
  • Wire Clip
  • Flat Clip
  • Stainless steel T-Bar Clip
  • Ultra-clean Sleeved (Silicon) Emitter Point
  • Simco-Ion Emitter Point Cleaner
  • Polycarbonate Rods

Please refer to all the applicable industry standards for comprehensive electrostatic charge management on our Industry Standards page.

BROCHURES

Target Markets

  • Back-End Semiconductor Processing
  • Front-End Semiconductor Manufacturing

Target Applications

The AeroBar 5225 is designed to control electrostatic discharge and particle contamination in mini-environments and workstations and in locations where forced-air is not favored and usually work in cleaner environment with laminar flow.