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Simco-Ion's Micro Series™ in-tool ultra-clean ionizers help the semiconductor front-end wafer manufacturing by neutralizing static charges on the wafer surface and surrounding equipment. This helps to prevent electrostatic discharge (ESD) events, which can damage or contaminate the wafer during processing. Small particles have higher mobility and are more easily attracted by lower charge; this increased attraction causes small particles to hit the wafer surface at high velocity.
Simco-Ion’s In-line CDA/Nitrogen Gas Ionizer Model 4210 when provided with gas from an ultra-clean source, operates 10 times better than Class 3 cleanroom requirements.
Unlike other nitrogen ionizers which depend on the trace gases in the nitrogen stream to produce ionization, the Model 4214 ionizes nitrogen molecules using a small but efficient power supply..
Its unique quadropole configuration ensures effective ionization as close as 3 inches from the product. The 4630’s compact size is designed to fit easily into the tight confines of any process equipment.
With its own independent air delivery system, the Model 4635 provides ionization where airflow is limited or unavailable offering two air assist cartridge design options.
This incredibly compact ionizer offers tungsten emitters. In-Line fusION can be powered directly from a process tool’s 24 VDC power source or by the Simco-Ion fusION power supply kit.
