Novx 7000

Novx 7000 Critical Process Environment ESD Monitor

Monitoring Critical Electrostatic Parameters in Workstations & Process Environments

The Novx Series 7000 Process Monitoring System is a multi-purpose microprocessor-based instrument for monitoring critical electrostatic related parameters in workstation and process environments. The six dedicated channels customize the instrument for the monitoring field voltage detection/ionizer balance, ESD event, body voltage detection or ground monitoring and particle counting.

  • Smart Signal Processing
  • Multiple sensor and antenna styles
  • Daisy chainable; RS-485 or Ethernet output
  • ESD event detection tracking
  • Three options for field voltage monitoring
  • User-programmable alarm set-points with automated messaging
  • Closed-loop control to tool computer
  • Plug-in modules allow factory upgrades

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Novx 7000


For additional information on the Novx 7000 or other ionization solutions for static control and particle contamination control, contact Sales Services.


Specifications

Field Sensing

Input Voltage
±15 - ±5000V
Output Voltage
0 - ±5.0
Accuracy ±1V for <20V; ±5% for >20V
ESD Event Detection
CDM / HBM
Particle Counter Interface
Data Acquisition
Body Voltage Detection

Applied Voltage
<0.5V
Accuracy ±0.5V
GND Monitoring

Range
1-20 ohms
Applied Voltage
<0.5V
Accuracy 0.5 ohms
General
Dimension 2.7W x 7H x 5.5D in. (6.9 x 17.8 x 14 cm)
Weight 2.5 lb (1.4 kg)
  • Mounting Bracket
  • Passive Antennas
  • Cable Assembly for Ionizer Feedback
  • Cable Adapter
  • Micro ESD Antennas
  • Micro ESD Directional Antenna
  • RS-485 Board
  • RJ Interface Cable
  • Ethernet Board
  • Cat 5e with RJ-45 Ethernet Cable
 

Target Markets

  • Electronics Manufacturing
  • Life Sciences
  • Back-end Semiconductor Processing
  • Front-end Semiconductor Processing
  • Flat-panel Display

Target Applications

The Novx 7000 System enables monitoring for critical electrostatic variables in both front-end and back-end semiconductor manufacturing environments. The multi-function sensing capability and industrial communication abilities enable integration of real-time monitoring with process electrostatic control. As a general tool for electrostatic monitoring of ESD events, electrostatic fields, particle density, personnel and workstation grounding, and the ability to control ionizer balance and discharge parameters, it also enhances monitoring uses in FPD, disk-drive and medical manufacturing applications.