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Front-end Semiconductor Manufacturing Static Control Solutions

Critical Protection from ESD, ESA, EMI Events

In front-end semiconductor manufacturing, ESD (electrostatic discharge), ESA (electrostatic attraction), and EMI (electromagnetic interference) are persistent threats to yield, tool uptime, and cleanroom compliance.

ESA causes particles to cling to charged surfaces, contaminating wafers, masks, and optical components. ESD can damage sensitive devices, while EMI disrupts automated tools and inspection systems—leading to downtime and process instability.

Controlling these electrostatic forces is essential for maintaining ISO 14644 cleanroom standards, reducing defects, and ensuring process reliability across critical operations like lithography, wafer handling, and etch. In today’s ultra-clean, precision-driven fabs, preventing contamination through static control is not optional—it’s critical.

Industry Challenges

Why Static Control Matters in Front-end Semiconductor Manufacturing Environments

 

         
                     
PARTICLE
CONTAMINATION
Static draws particles that impact device integrity
 
CLEANROOM COMPLIANCE
Maintaining ISO 14644-1 standards is difficult without proper static control
 
YIELD
LOSS
Static events reduce wafer quality and increase rework
 
ELECTRONIC
ESD DAMAGE
ESD can cause latent or catastrophic damage to embedded electronics
 
TOOL
DISRUPTION
EMI interferes with automated handlers and sensors
 
NODE
MINIATURIZATION
Smaller nodes are more vulnerable to ESD/ESA

Industry Regulation

What Regulations Address Static Control in the Industry?

Static control is not just a best practice—it’s a regulated requirement in front-end semiconductor fabs where nanometer-scale precision and ultra-clean environments are critical. Several international and industry-specific standards govern how electrostatic discharge (ESD), electrostatic attraction (ESA), and airborne particle contamination are managed in cleanroom environments.

  • ISO 14644 – Cleanroom Classification Standards: Defines air cleanliness levels based on particle concentration and size. ISO 14644-1 is especially relevant in front-end semiconductor fabs where maintaining ISO Class 1–5 conditions is essential for minimizing contamination. Static control directly supports compliance by reducing ESA-driven particle buildup.
  • ANSI/ESD S20.20 – ESD Control Program Guidelines: Developed by the ESD Association, this standard provides a comprehensive framework for establishing an ESD control program. It applies to facilities that handle sensitive electronic components and outlines requirements for grounding, personnel handling, ionization, and process monitoring.
  • SEMI E78-0308 – Ionizer Performance Evaluation: This semiconductor-specific standard details how to evaluate ionization systems used in cleanroom and tool environments. It specifies test methods and performance metrics such as ion balance, decay time, and reliability—key for selecting the right ionizer in front-end fabs.
  • IEC 61340 – International ESD Safety & Control Standard: This international standard (by the IEC) addresses protection of electronic devices from electrostatic phenomena. It includes general requirements for ESD-safe environments and harmonizes global practices for manufacturers working across regions.

 

Key Application Areas

Front-end Semiconductor Manufacturing Applications We Support

Static control is essential across multiple front-end fab processes:

  • Photolithography & EUV – Protect reticles and prevent pattern defects
  • EFEM Modules – Avoid particle attraction during wafer transfers
  • Wet Cleans & Spin Rinse Dryers – Control charge in chemical processing
  • Ion Implantation – Dissipate charge buildup during dopant delivery
  • Etch & Deposition Tools – Maintain cleanliness and prevent ESD-related damage
  • Reticle Storage & Transport – Eliminate charge accumulation on mask carriers
  • and more...

For additional information on front-end semiconductor manufacturing solutions, contact Sales Services.

Benefits of Static Control

  • Yield Protection – Reduce wafer loss from ESD or contamination

  • Process Stability – Maintain tool uptime and minimize EMI issues

  • Regulatory Readiness – Support ISO, ANSI/ESD, and SEMI compliance

  • Real-Time Insight – Monitor charge conditions and ionizer performance

  • Cleanroom Confidence – Operate within ISO Class 1–5 specs

Our Solutions

Targeted Solutions for Critical Environments

Product Groups

Models

Room Ionization System

Model 5515 Room System

Ionizing Blowers

Model 5810i, Model 5842

Ionizing Bars

Aerobar 5225, AeroBar 5225S, AeroBar MP 5635,
AeroBar MP 5635M, AeroBar MP 5645/5645 LP,
AeroBar 5685

Special Application

Model 4210, Model 4214, Model 4612, Model 4612,
QuadBar 4630, QuadBar 4635 

Ionizing Air Guns & Nozzles

AirForce 6115

Static Control Monitoring Systems

Novx 3352, Novx 3362, Novx 7000, Minipulse

Instrumentation Fieldmeter 775 or Fieldmeter FMX-004, 775PVS, CPM280A