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AeroBar® 5635 MP

Aerobar 5635 Modulated Pulse Ultraclean Air Ionizing Bar

       

    

Modulated Pulse Technology with Wide Adjustability & ISO 14644-12 Ionization

Simco-Ion, Technology Group's AeroBar 5635 Modulated Pulse ionizing bar is specifically designed to eliminate static charge in semiconductors and other ultra-clean manufacturing processes where fast discharge time, low swing voltages, and precision balance are required. The Model 5635 utilizes MP technology, combining a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultra-clean silicon emitter points and precision adjustment, provides ISO 14644-12 ionization (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) cleanliness, critical for smaller technology nodes.

  • Extended ISO Class 1 (10 nm) particles cleanliness
  • Modulated pulse technology
  • Excellent lateral uniformity
  • Low field voltages
  • Air-assist capability
  • Optional software with an easy-to-use interface with wide adjustability
  • Alarm output signal

 

For additional information on the AeroBar 5635 or other ionization solutions for static control and particle contamination control, contact Sales Services.

Sales Services: 

+1 (510) 217-0460

Toll-Free:

+1 (800) 367-2452

salesservices@simco-ion.com
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Specifications

Voltage Input: 24 VDC ±10% power input RJ-45; 0.7A (max)
Output: 13.5 kV p-p (max), adjustable
Discharge ±1000-100V in 15 sec (typ) with no air-assist, Vp-p Swing of 80 at 24” below an emitter center group of points
Balance <±35V measured in a controlled environment at 18” distance
Ion Emission Modulated Pulse (MP) Technology
Emitter ISO 14644-1 Class 1 Single-crystal Silicon
Cleanroom Class ISO 14644-1 (0.1 μm particles) and Extended ISO Class 1 cleanliness (10 nm particles or nanoparticles) using 45-50% output voltage setting and OpenJet nozzles with Singlecrystal Silicon emitters
Dimension 3.1”H x 1.3”W x 17.7 / 23.6 / 33.5 / 39.3 / 45.3 / 51.2 / 57.1 / 63.0 / 69.0 / 74.8 / 80.7 / 86.6 / 92.5”L (7.8 x 3.4 x 45 / 60 / 85 / 100 / 115 / 130 / 145 / 160 / 175 / 190 / 205 / 220 / 235 cm)
  • Signal and Power Junction Box for FMS Connection
  • Remote Serial Adapter Kit
  • 100-240 VAC to 24 VDC Power Transformer
  • 24 VDC Power Converter with Signal and Power Junction Box
  • Horizontal Mounting Brackets
  • Vertical Mounting Brackets
  • Flat Mounting Clips
  • M4 Metric Flat Mounting Clip
  • Cat-5e with RJ-45 Ethernet Cable
  • Eyebolt with Nut
  • OpenJet Nozzle Assembly
  • IEC Power Cord
  • Single Crystal Silicon Emitter Points
  • Simco-Ion Emitter Point Cleaner

Please refer to all the applicable industry standards for comprehensive electrostatic charge management on our Industry Standards page.

BROCHURES

Target Markets

  • Front-End Semiconductor Manufacturing

Target Applications

AeroBar 5635 is specifically designed for semiconductor wafer processing and the stringent cleanliness and performance requirements at smaller geometries. It provides ISO 14644-12 ionization (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) cleanliness.

AeroBar 5635 Ionizer Installed over Wafer Handler