AeroBar® 5635 MP

Aerobar 5635 Modulated Pulse Ultraclean Air Ionizing Bar



Modulated Pulse Technology with Wide Adjustability & ISO 14644-12 Ionization

Simco-Ion's AeroBar 5635 Modulated Pulse ionizing bar is specifically designed to eliminates static charge in semiconductor and other ultra-clean manufacturing processes where fast discharge time, low swing voltages, and precision balance are required. The Model 5635 utilizes MP technology, combining a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultra-clean silicon emitter points and precision adjustment, provides ISO 14644-12 ionization (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) cleanliness, critical for smaller technology nodes.

  • ISO 14644-12 (0.01 µm particles) ionization
  • ISO 14644 Class 1 (0.1 µm particles) cleanliness
  • Modulated pulse technology
  • Excellent lateral uniformity
  • Low field voltages
  • Air-assist capability
  • Optional software with easy-to-use interface with wide adjustability
  • Alarm output signal

Download Datasheet

AeroBar 5635

For additional information on the AeroBar 5635 or other ionization solutions for static control and particle contamination control, contact Sales Services.


Input Voltage 24 VDC ±10%
Balance Auto balancing system <±20V over time and across the bar length (measured in a controlled environment at 24” distance)
Ion Emission Modulated pulse (MP) technology
Emitter Points Single-crystal silicon emitter points
Cleanliness Meets ISO 14644-12 ionization (0.01 mm particles or nanoparticles) and ISO 14644 Class 1 (0.1 mm particles) using 45-50% output voltage
Dimension 3.1H x 1.3W x 18/24/34/39/45/51/57/63/69/75/81/87/93L in.
(78H x 34W x 450/600/850/1000/1150/1300/1450/1600/1750/
1900/2050/2200/2350L mm)
  • Signal and Power Junction Box for FMS Connection
  • Remote Serial Adapter Kit
  • 100-240 VAC to 24 VDC Power Transformer
  • 24 VDC Power Converter with Signal and Power Junction Box
  • Horizontal Mounting Brackets
  • Vertical Mounting Brackets
  • Flat Mounting Clips
  • M4 Metric Flat Mounting Clip
  • Cat-5e with RJ-45 Ethernet Cable
  • Eyebolt with Nut
  • OpenJet Nozzle Assembly
  • IEC Power Cord
  • Single Crystal Silicon Emitter Points
  • Simco-Ion Emitter Point Cleaner

Target Markets

  • Front-End Semiconductor Manufacturing

Target Applications

AeroBar 5635 is specifically designed for semiconductor wafer processing and the stringent cleanliness and performance requirements at smaller geometries. It provides ISO 14644-12 ionization (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) cleanliness.

AeroBar 5635 Ionizer Installed over Wafer Handler