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Critical Environment Ultra-clean Ionizing Bars

Our critical environment ultra-clean products are designed to operate in ISO 14644 Class 1 (0.1 µm particles) and meet our in-house standard, Extended ISO Class 1. This in-house standard is based on an extrapolation of ISO 14644-1 to smaller particle sizes but no changes to ISO 14644-1. The basis of the extrapolation employs the formula used to define the existing ISO 14644-1 class limit lines. When extrapolated, the permitted number of particles sized 0.01 micron, and larger is 1200 particles/m3 (or 34 particles/ft3 ). 

These ultra-clean ionizers are the perfect solution for those manufacturing or test environments that require the highest control level of airborne contaminants.

AeroBar® Model 5645 with Feedback Control

Model 5645 Modulated Pulse (MP) Technology ionization bar is now available with active monitoring and feedback control through the Novx System and Novx Inside versions. Meets ISO Class 1 with Silicon (SCSi).

 

Low Profile AeroBar® Model 5645LP with Feedback Control

Model 5645LP Low Profile Modulated Pulse (MP) Technology ionization bar is now available with active feedback and control through tthe Novx System and Novx Inside versions. Meets ISO Class 1 with Silicon (SCSi).

 
 
 
AeroBar 5635 Class 1 Air Ionizing Bar


AeroBar® Model 5635

Model 5635 utilizes Modulated Pulse (MP) Technology, combining a high-frequency sine wave with modulated pulses for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer.  Meets ISO Class 1 and Extended ISO Class 1 environments.

AeroBar 5635M MP Metal-free Ultraclean Air Ionizer


AeroBar® Model 5635M – Metal Free

Model 5635M utilizes Modulated Pulse (MP) Technology and is specifically designed to eliminate static charge in semiconductor and other ultra-clean manufacturing processes where no exposed metallic surfaces are not permitted.  Meets ISO Class 1 and Extended ISO Class 1 environments.

AeroBar 5225 Class 1 Software-controlled Ionizing Air Bar

AeroBar® 5225 In-tool Ionizing System

Model 5225 is easily integrated with your tool, using either pre-compiled routines or open-source code examples. Seamless integration with tool interfaces means a less costly solution to ionization, in addition to the benefits of reduced maintenance cost and better alarm handling.

AeroBar 5225S Class 1 Ionizing Air Bar

AeroBar® 5225S Standalone Ionizing Bar

Model 5225S is adjustable and precise, easy-to-use digital settings allow the AeroBar to be used in a multitude of applications, ranging from inside tools to workstations and cleanroom areas.