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Critical Environment Ultra-clean Ionizing Bars

Our critical environment ultra-clean products are designed to operate in ISO 14644 Class 1 (0.1 µm particles) and meet our in-house standard, Extended ISO Class 1. This in-house standard is based on an extrapolation of ISO 14644-1 to smaller particle sizes but no changes to ISO 14644-1. The basis of the extrapolation employs the formula used to define the existing ISO 14644-1 class limit lines. When extrapolated, the permitted number of particles sized 0.01 micron, and larger is 1200 particles/m3 (or 34 particles/ft3 ). 

These ultra-clean ionizers are the perfect solution for those manufacturing or test environments that require the highest control level of airborne contaminants.

AeroBar® Model 5645 with Feedback Control

Simco-Ion’s Modulated Pulse (MP) Technology ionization bar is now available with active monitoring and feedback control through the Novx System and Novx Inside versions. Meets ISO Class 1 with Silicon (SCSi).

 

Low Profile AeroBar® Model 5645LP with Feedback Control

Simco-Ion’s Low Profile Modulated Pulse (MP) Technology ionization bar is now available with active feedback and control through tthe Novx System and Novx Inside versions. Meets ISO Class 1 with Silicon (SCSi).

 
 
 
AeroBar 5635 Class 1 Air Ionizing Bar


AeroBar® Model 5635

Model 5635 utilizes Modulated Pulse (MP) Technology, combining a high-frequency sine wave with modulated pulses for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer.  Meets ISO Class 1 and Extended ISO Class 1 environments.

AeroBar 5635M MP Metal-free Ultraclean Air Ionizer


AeroBar® Model 5635M – Metal Free

Model 5635M utilizes Modulated Pulse (MP) Technology and is specifically designed to eliminate static charge in semiconductor and other ultra-clean manufacturing processes where no exposed metallic surfaces are not permitted.  Meets ISO Class 1 and Extended ISO Class 1 environments.

AeroBar 5225 Class 1 Software-controlled Ionizing Air Bar

AeroBar® 5225 In-tool Ionizing System

Model 5225 is easily integrated with your tool, using either pre-compiled routines or open-source code examples. Seamless integration with tool interfaces means a less costly solution to ionization, in addition to the benefits of reduced maintenance cost and better alarm handling.

AeroBar 5225S Class 1 Ionizing Air Bar

AeroBar® 5225S Standalone Ionizing Bar

Model 5225S is adjustable and precise, easy-to-use digital settings allow the AeroBar to be used in a multitude of applications, ranging from inside tools to workstations and cleanroom areas.