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AeroBar® 5635M MP

Metal-free Ultra-clean Air Ionizing AeroBar Model 5635M

       

    

Modulated Pulse Technology with Wide Adjustability & ISO 14644-12 Ionization

Simco-Ion, Technology Group's Model 5635M AeroBar MP ionizing bar is specifically designed to eliminate static charge in semiconductor and other ultra-clean manufacturing processes where fast discharge time, low swing voltages and precision balance are required, but exposed metallic surfaces are not permitted. The AeroBar utilizes MP technology, combining a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultra-clean silicon emitter points and precision adjustment, provides ISO 14644-12 ionization (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) cleanliness, critical for smaller technology nodes.

  • ISO 14644-12 (0.01 µm particles) ionization and
    ISO 14644 Class 1 (0.1 µm particles) cleanliness
  • Modulated pulse technology
  • Metal-free design “M”
  • Excellent lateral uniformity
  • Low field voltages
  • Air-assist capability
  • Optional software with easy-to-use interface with wide adjustability
  • Alarm output signal

 

For additional information on the AeroBar 5635M ionizer or other ionization solutions for static control and particle contamination control, contact Sales Services.

Sales Services: 

+1 (510) 217-0460

Toll-Free:

+1 (800) 367-2452

salesservices@simco-ion.com
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Specifications

Input Voltage Input: 24 VDC ±10% power input RJ-45; 0.7A (max)
Output: 13.5 kV p-p (max), adjustable
Discharge ±1000-100V in 15 sec (typ) with no air-assist, Vp-p Swing of 80 at 24” below an emitter center group of points
Balance <±35V measured in a controlled environment at 18” distance
Ion Emission Modulated Pulse (MP) Technology
Emitter ISO 14644-1 Class 1 Single-crystal Silicon
Cleanroom Class ISO 14644-1 (0.1 μm particles) and Extended ISO Class 1 cleanliness (10 nm particles or nanoparticles) using 45-50% output voltage setting and OpenJet nozzles with Singlecrystal Silicon emitters
Dimension 3.1”H x 1.3”W x 13.8 / 17.7 / 23.6 / 33.5 / 39.3 / 45.3 / 51.2 / 57.1 / 63.0 / 69.0 / 74.8 / 80.7 / 86.6 / 92.5”L
(7.8 x 3.4 x 35 / 45 / 60 / 85 / 100 / 115 / 130 / 145 / 160 / 175 / 190 / 205 / 220 / 235 cm)
  • Signal and Power Junction Box for FMS Connection
  • Remote Serial Adapter Kit
  • 100-240 VAC to 24 VDC Power Transformer
  • 24 VDC Power Converter with Signal and Power Junction Box
  • Delrin Plastic flat mounting bracket and swivelCat-5e with RJ-45 Ethernet Cable
  • OpenJet Nozzle Assembly
  • IEC Power Cord
  • Single Crystal Silicon Emitter Points
  • Simco-Ion Emitter Point Cleaner

Please refer to all the applicable industry standards for comprehensive electrostatic charge management on our Industry Standards page.

Target Markets

  • Front-End Semiconductor Manufacturing

Target Applications

AeroBar 5635M is specifically designed for semiconductor wafer processing and the stringent cleanliness and performance requirements at smaller geometries along with environments that need to be metal free. It provides ISO 14644-12 ionization (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) cleanliness.

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