Simco-Ion’s Model 5635M AeroBar MP ionizing bar is specifically designed to eliminate static charge in semiconductor and other ultra-clean manufacturing processes where fast discharge time, low swing voltages and precision balance are required, but exposed metallic surfaces are not permitted. The Model 5635M utilizes MP technology, combining a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultra-clean silicon emitter points and precision adjustment, provides ISO 14644-12 ionization (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) cleanliness, critical for smaller technology nodes.
- ISO 14644-12 (0.01 µm particles) ionization
- ISO 14644 Class 1 (0.1 µm particles) cleanliness
- Modulated pulse technology
- Metal-free design “M”
- Excellent lateral uniformity
- Low field voltages
- Air-assist capability
- Optional software with easy-to-use interface with wide adjustability
- Alarm output signal
For additional information on the AeroBar 5635M ionizer or other ionization solutions for static control and particle contamination control, contact Sales Services.
+1 (510) 217-0460
+1 (800) 367-2452