Simco-Ion’s Micro Series Blowers are designed for advanced critical environment in-tool applications where space is a constraint. The new 5941 Micro Blower is compactly designed but exceptionally effective in meeting current requirements for advanced automated process tools. Only 4.33” (110 mm) tall and 3.15” (80 mm) wide, this amazing compact in-tool blower offers outstanding performance in back-end semiconductor environments.
- ±3V or better balance
- Compact size
- Cleanliness rated at ISO 14644-1 Class 3
- Facility Monitoring System (FMS) connection
- Auto-clean system