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Simco-Ion’s In-line Gas Ionizer Model 4210 when provided with gas from an ultra-clean source, operates 10 times better than Class 3 cleanroom requirements. Careful material selection and control of internal geometry ensure ultra-clean ionized gas delivery.
For additional information on the 4210 ionizer or other ionization solutions for static control and particle contamination control, contact Sales Services.
The 4210 has been used to solve static charge problems in a variety of wafer fab applications, including steppers, spin rinser dryers, load and unload stations, disk certifiers, wafer management systems, and furnaces.