AeroBar® 5225 Ionizing System

AeroBar 5225 ISO Class 1 Software-controlled Static Control Ionizing Bar

 Ion Manager Room Ionization Management System    

Cleanroom Capatible for High Ion Output for Fast Neutralization

Simco-Ion’s Model 5225 Digital AeroBar with Software Control is designed to handle the demanding requirements of in-tool ionization. With high ion output providing fast neutralization of electric charge on wafers, E78 compliance at the most stringent levels can be achieved.

  • Complete integration with tool control system
  • Fully adjustable parameters for each AeroBar
  • Ion current monitoring
  • Several lengths available including 3 specifically designed for EFEMs
  • Single-crystal silicon emitter points

Interface Module Model 5200-IM6T

Powers and supports up to 6 AeroBar Model 5225 Ionizers, FMS output.


Download Datasheet

AeroBar 5225


For additional information on the AeroBar 5225 ionizer or other ionization solutions for static control and particle contamination control, contact Sales Services.


Specifications

AeroBar 5225
Input Voltage 24 VAC, 50/60 Hz, 1W (typ), received from the Interface Module
Ion Emission Pulsed DC, Steady-state DC or standby
Emitter Points Single-crystal Silicon, replaceable
Cleanliness ISO 14644-1 Class 1
Dimension 2.1H x 1.2W x 22.4, 28.4, 35.7, 44.4, 55.6, 64.4, 75.5, or 84.4L in.
(5.3H x 3.1W x 56.9, 72.1, 90.7, 112.8, 141.2, 163.6, 191.8, or 214.4 L cm)
Weight 1.5 lb (1.02 kg) for a 22 in (56.9 cm) bar (approx. 6 oz per additional ft/0.17 kg per additional 30 cm)
Interface Module
Model 5200-IM6T
 
Input Voltage 24 VDC, 1.0A, ±5%
Capacity Connect to up to six Model 5225 AeroBars
Indicators Green POWER ON, yellow COMMUNICATION, red ALARM
Dimension 2.9H x 2.8W x 12.4L in. (7.4H x 7.1W x 31.5L cm)
Weight 4 lb (2 kg)
  • Wire Terminal Connector
  • Wire Ties
  • Tie Blocks
  • Interconnect Cables
  • CPC Cables
  • Standard AeroBar Installation Kit
  • Pine Tree Clips
  • Eyebolt with nut
  • Mid-Clips
  • Wire Clip
  • Flat Clip
  • Stainless steel T-Bar Clip
  • Ultra-clean Sleeved (Silicon) Emitter Point
  • Simco-Ion Emitter Point Cleaner
  • Polycarbonate Rods

 

Target Markets

  • Back-End Semiconductor Processing
  • Front-End Semiconductor Manufacturing

Target Applications

The AeroBar 5225 is designed to control electrostatic discharge and particle contamination in mini-environments and workstations and in locations where forced-air is not favored and usually work in cleaner environment with laminar flow.