Simco-Ion’s Model 5225 Digital AeroBar with Software Control is designed to handle the demanding requirements of in-tool ionization. With high ion output providing fast neutralization of electric charge on wafers, E78 compliance at the most stringent levels can be achieved.
- Complete integration with tool control system
- Fully adjustable parameters for each AeroBar
- Ion current monitoring
- Several lengths available including 3 specifically designed for EFEMs
- Single-crystal silicon emitter points
Interface Module Model 5200-IM6T
Powers and supports up to 6 AeroBar Model 5225 Ionizers, FMS output.