Simco-Ion’s Model 5225 Digital AeroBar with Software Control is designed to handle the demanding requirements of in-tool ionization. With high ion output providing fast neutralization of electric charge on wafers, E78 compliance at the most stringent levels can be achieved.
Interface Module Model 5200-IM6T
Powers and supports up to 6 AeroBar Model 5225 Ionizers, FMS output.
For additional information on the AeroBar 5225 ionizer or other ionization solutions for static control and particle contamination control, contact Sales Services.
IonManager Room System
Ionization Management Software
The AeroBar 5225 is designed to control electrostatic discharge and particle contamination in mini-environments and workstations and in locations where forced-air is not favored and usually work in cleaner environment with laminar flow.